ant95-l-zThe ANT-L-Z and ANT-L-Z-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. As an evolution of the ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.

  • In-position stability of <2 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performancea
Stage model Total Travel Accuracy Minimum Step Maximum Speed Maximum Acceleration Additional information
ANT95-L-Z Up to 50 mm Up to ±300 nm 2 nm 200 mm/s 1 g View source
ANT130-L-Z Up to 60 mm Up to ±300 nm 2 nm 200 mm/s 1 g View source


Noncontact Direct-Drive

All of the original ANT series’ direct-drive advantages have been preserved in the ANT-L-Z family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT-L-Z stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

The ANT-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user-adjustable from 0 to 10 kg.

Flexible System Design

The ANT-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT-L-Z stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

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