avsi106Aerotech’s AVS100/AVSI100 series stages offer the ideal solution for applications that require very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor wafer inspection and testing, fiberoptics assembly and inspection, automated tool alignment, machine vision inspection systems and laser machining applications.

  • Long-life linear guide bearing system
  • Submicron closed-loop positioning
  • Low-cost, high-performance stage
Stage model Total Travel Accuracy Minimum Step Maximum Speed Maximum Acceleration Additional information
AVS/AVSI100 Up to 25 mm Up to ±1.0 µm Up to 5.3 nm 50 mm/s - View source

Overview

Quality Design Provides Superior Performance

The AVS100/AVSI100 series provides precise elevation of a load in a vertical plane using a moving wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw to vertical elevation of the AVS100/AVSI100 series tabletop.

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured.

Careful design of the wedge angle and bearing system allows the AVS100/AVSI100 series to achieve submicron resolution and still maintain a compact profile. The optional HALAR factory calibration option is available to further increase standard accuracy and repeatability.

A Better Approach to Vertical Motion

The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS100/AVSI100 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects. The AVS100/AVSI100 series stages provide a space-saving alternative to traditional XYZ systems and are equally suited to laboratory and industrial applications. Optional stage finishes are available for various environments, including vacuum preparation.

Additional Standard Features

All AVS100/AVSI100 series stages are equipped standard with integral limit switches and mechanical hard stops. The stage tabletop is treated with a Teflon®-impregnated hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest environments. The stage itself has a black anodize finish.

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