wafermax_zThe WaferMax Z represents a significant breakthrough in vertical alignment of high-precision components in one compact package. Its superior noncontact linear motor drive employs a high-accuracy encoder for direct position feedback. When combined with Aerotech’s MXH multiplier, it offers 0.83 nm resolution in addition to high speed and accuracy.

  • Low profile for space-conscious applications
  • Noncontact direct-drive
  • High repeatability
Stage model Total Travel Accuracy Minimum Step Maximum Speed Maximum Acceleration Additional information
WaferMax Z 5 mm ±1.5 µm 0.83 nm 4 mm/s - View source

Overview

Superior Mechanical Design

Bearing elements are crossed-roller style for maximum smoothness and reliability. These are mounted on an optimized base and wedge assembly for stiffness and low mass/inertia, enhancing dynamic performance.

All the critical elements of the WaferMax Z were selected to operate in a 24/7 industrial environment and, unlike screw- or piezo-based vertical stages, the WaferMax Z requires no maintenance and will ensure years of trouble-free operation.

Brushless Direct-Drive

To maximize positioning performance, the WaferMax Z utilizes Aerotech’s BLMUC-series brushless, slotless linear motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax Z ideal for contoured motion, smooth scan velocity or precise incremental steps.

Accurate Positioning

Performance is assured with a precision linear encoder that results in 0.8 nm resolution. The motor and high-performance linear encoder are directly coupled to increase accuracy.

Flexible Configurations

Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.

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