abl3600The ABL3600 dual-axis, large aperture, open-frame, air-bearing stage addresses the unique needs of scanning microscopy and mask and wafer inspection.

  • Large clear aperture
  • Full preload on all axes
  • Dual linear-motor-driven X and Y axes
Stage model Total Travel Accuracy Minimum Step Maximum Speed Maximum Acceleration Additional information
ABL3600 250 x 250 mm ±1 µm Up to 1 nm 200 mm/s 0.25 g View source

Overview

Design and Construction

The combination of high stiffness air bearings and dual linear-motor-driven axes provides an XY open-frame stage with exceptional performance characteristics. The ABL3600 represents a major upgrade in performance over traditional mechanical bearing open-frame stages.

As with all Aerotech air-bearing systems, proprietary manufacturing techniques are used to produce stages with unsurpassed geometric characteristics including straightness, flatness, pitch, roll and yaw. The ABL3600 is manufactured in Aerotech’s state-of-the-art production facility and is machined with exacting tolerances that are unachievable by conventional methods.

Brushless Linear Servomotor

The ABL3600 incorporates a high-power linear motor to meet the needs of the most demanding applications. This results in a stage with all of the advantages of a direct-drive mechanism: zero backlash, no windup, exceptional acceleration, zero friction and outstanding servo stiffness. Many applications require extreme stability of motion that can only be met with a linear motor drive. Since the drive train has zero friction and no recirculating elements, the ABL3600 is ideal for scanning, imaging or any other precision application.

High-Accuracy Linear Encoder Feedback

The standard feedback device is a high-resolution, noncontact, linear encoder. This noncontact encoder offers exceptional repeatability and stability over a range of operating conditions. Both digital and analog output versions are available.

Cable Management

Years of research have resulted in what is universally considered to be the best cable management system (CMS) in the industry. We carefully optimize the cable bend radius and utilize only the highest quality cable to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. To facilitate integration into the final system, we include all customer-required cables, air hoses, etc. in our CMS bundle. Both ends are fully connectorized for simple integration into the customer’s machine.

Custom Designs

Aerotech has engineered and manufactured custom high-performance systems to meet customers’ needs and specifications for a variety of applications. We can draw on over 35 years of motion control and positioning system experience to produce the ideal solution for your application.

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