planardlAerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing.

  • Integrated, low-profile, XY, linear-motor stage
  • Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm)
  • Anti-creep, precision crossed-roller bearings
Stage model Total Travel Accuracy Minimum Step Maximum Speed Maximum Acceleration Additional information
PlanarDL Up to 300 x 300 mm Up to ±0.4 µm 3 nm Up to 1000 mm/s Up to 1.5 g View source

Overview

Superior Stage Design

The PlanarDL XY design allows for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances.

The PlanarDL structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design permit smooth motion making this an ideal stage solution for challenging scanning applications.

Noncontact Direct-Drive Technology

Only noncontact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear motor designs.

The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy.

Integrated Cable Management

The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.

Extreme Positioning Performance

The PlanarDL is available in three positioning performance options. Relying upon decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.

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