planarslAerotech’s PlanarSL mechanical bearing, ball-screw-driven XY stages offer exceptional performance in a cost-effective, low-profile package. Combining two axes of motion in a compact package, the PlanarSL is the perfect solution for applications ranging from surface metrology to general high-precision automation.

  • Integrated, low-profile, XY, ball-screw stage
  • Long-life linear motion guide bearing system
  • Optional low thermal expansion glass linear encoder
Stage model Total Travel Accuracy Minimum Step Maximum Speed Maximum Acceleration Additional information
PlanarSL 100 x 100 mm Up to ±1.0 µm 0.1 µm 30 mm/s  - View source


Robust, High-Precision Design

The PlanarSL comes standard with a precision-ground and preloaded ball screw. Unlike competitive designs where the ball screw is positioned on the side or off-center, the PlanarSL is designed to drive directly through the centers of friction and stiffness resulting in superior geometric performance and accuracy.

High-precision linear motion guide bearings provide excellent straightness and flatness performance while supplying optimal support of the moving carriage over the entire XY travel. Using careful design and years of experience in precision motion systems, the PlanarSL structural elements have been optimized for the highest possible planar performance.

Optional Low Thermal-Expansion Linear Encoder

Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the PlanarSL is available with low-thermal expansion (3.3 ppm/˚C) precision glass scales on both axes allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder, available with amplified sine (1 Vpp) or 0.1 µm TTL digital outputs, is mounted near the centers of action, again providing an optimized stage solution for high-accuracy positioning.

Configuration Options

The PlanarSL is available standard with a 24 VDC bipolar stepper motor. Aerotech can also provide brushless and brush DC motors with high-resolution rotary encoders preconfigured for use with Aerotech controls.

Wide Variety of Control Options

A wide selection of state-of-the-art motion controllers is available to control the PlanarSL series. This suite of software and drive electronics provides various cost and performance levels to meet the needs of any application.

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