QNP PiezoAerotech’s QNP-series of piezo nanopositioning stages offer sub-nanometer-level performance in a compact, high-stiffness package. A variety of travel (100 µm to 600 µm) and feedback options make this the ideal solution for applications ranging from microscopy to optics alignment.

  • Travel ranges from 100 µm to 600 µm available
  • High-precision, frictionless flexure guidance system
  • Superior positioning resolution and linearity
Model Closed-Loop Travel Open-Loop Travel Resolution Linearity Additional information
QNP-40-100L 100 µm 120 µm Up to 0.15 nm 0.01% View source
QNP-50-250L 250 µm 300 µm Up to 0.2 nm 0.01% View source
QNP-60-500L 500 µm 600 µm Up to 0.4 nm 0.007% View source

Overview

High Quality in a Compact Package

The QNP piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. Furthermore, these stages have been designed to provide excellent geometric performance (straightness and angular errors) while at the same time minimizing the overall stage package size.

qnp-l-figure-1

QNP-40-100L 0.5 nm bidirectional step plot measured with an external ultra-precision capacitance sensor. All sizes of the QNP-L stage series offer exceptional sub-nm mechanical step capability.

High-resolution and Positioning Accuracy

All of the QNP piezo stages have the option of closed-loop feedback using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly enabling superior accuracy and repeatability.

Ultra-Precision Control

When coupled with Aerotech’s Q-series of controllers and drives, the QNP piezo nanopositioning stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation and Command Shaping, providing improved tracking errors and faster step-and-settle times.

Automatic parameter and calibration identification is accomplished using Aerotech’s FlashConfig feature. The stage is automatically identified and all operational parameters including axis calibration data are uploaded into the controller ensuring safe, accurate and true “plug-and-play” operation.

Design Flexibility

Aerotech’s QNP piezo stages are available with capacitance sensor feedback or without feedback (open-loop). Open-loop provides a cost-effective option for applications where compact size, high-dynamics and sub-nanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source (interferometer, vision system, photodetector, etc.).

An optional mounting plate provides direct mounting to English or metric breadboard optical tables. The QNP-series also includes XY and Z stages in which common travels mount together with adapter plates.

All QNP piezo stages are available in vacuum-prepared versions upon request.

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