The ANT direct-drive rotary stages are designed as part of Aerotech’s nano Motion Technology product family. Our rotary stages offer unprecedented in-position stability (0.005 arc sec) and sub 0.01 arc-sec incremental motion performance, and are offered in two grades of accuracy.
- 0.01 arc sec resolution
- 0.005 arc sec in-position stability
- Outstanding error motion specifications
|Model||Aperture||Maximum Speed||Accuracy||Maximum load||Additonal information|
|ANT95-R||11 mm||Up to 200 rpm||Up to 3 arc sec||2 kg||View source|
|ANT130-R||11 mm||Up to 200 rpm||Up to 3 arc sec||3 kg||View source|
The ANT rotary stage series is designed for compatibility and easy integration with Aerotech’s ANT linear stage product offerings. Together these stages provide accuracy, stability and small-size performance capability for almost any nanomanufacturing or inspection application.
In addition to the high precision levels, these systems offer high dynamic performance and throughput ideal for disk drive manufacture and test.
The ANT rotary stage series was designed to operate in a 24/7 manufacturing environment. Unlike other rotary devices, the ANT rotary stage series requires no periodic maintenance, assuring years of trouble-free operation.